JELIGHT 813-1206-2GS Low Pressure Double-Bore Capillary UV Lamp
Lampe UV capillaire au mercure
Quecksilber Kapillare UV Lampe

Jelight Company Inc., Irvine, California.

Curing lamp. It was used in the Gasonics L3510 plasma system, designed for ashing and cleaning semiconductor wafers.

The name “double-bore” comes from the special quartz used to make these lamps. This glass consists of quartz tubing with a quartz partition or septum through the center. This allows the plasma to ignite at one electrode, travel around the septum, and back down to meet the other electrode, creating an arc of UV energy.

Fiche technique • Data sheet • Datenblatt: JELIGHT_Low_Pressure_Lamps.pdf

 

Longueur • Length • Länge : 107 mm • 4" 1/4
Diamètre • Diameter • Durchmesser : 6 mm • 1/4"

 

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